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Sensors | Free Full-Text | Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity
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Capacitive MEMS Pressure Sensor-Personalized Devices & Services-Smart Living-Innovations & Applications-Industrial Technology Research Institute
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Figure 2 from Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists | Semantic Scholar
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Figure 1 from Capacitive pressure sensors based on MEMS, operating in harsh environments | Semantic Scholar
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